MBI Staff Member – Personal info

MBI Publications

  1. The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

    V. Deinhart, L.-M. Kern, J. N. Kirchhof, S. Juergensen, J. Sturm, E. Krauss, T. Feichtner, S. Kovalchuk, M. Schneider, D. Engel, B. Pfau, B. Hecht, K. I. Bolotin, S. Reich, K. Höflich

    Beilstein Journal of Nanotechnology 12 (2021) 304-318