MBI Staff Member – Personal info

Dr. Herbert Legall

No longer employed at MBI

MBI Publications

  1. Characterization of a laser-produced plasma source for a laboratory EUV reflectometer

    F. Scholze, F. Scholz, J. Tuemmler, G. Ulm, H. Legall, P.V. Nickles, W. Sandner, H. Stiel, L. van Loyen

    SPIE Proceedings Series 5037 (2003) 670-681
  2. A new laboratory EUV reflectometer for large optics using a laser plasma source

    L. van Loyen, T. Boettger, S. Braun, H. Mai, A. Leson, F. Scholze, J.Tuemmler, G. Ulm, H. Legall, P.V. Nickles, W. Sandner, H. Stiel, C. E. Rempel, M. Schulze, J. Brutscher, F. Macco, S. Muellender

    SPIE Proceedings Series 5038 (2003) 12-21