Max Born Institute for Nonlinear Optics and Short Pulse Spectroscopy
Max Born Institute for Nonlinear Optics and Short Pulse Spectroscopy
Tue, 01.10.2024  |  10:00
Room: seminar room A, house A, room 2.01

Soft x-ray scatterometry for semiconductor metrology

Dr. Peter Smorenburg | ASML Research, The Netherlands

With the breakthrough of EUV lithography, the spatial scale in semiconductor manufacturing has decreased to well below the resolution limits of…
Tue, 01.10.2024  |  14:00
Room: Max Born Hall
MBI Colloquium

ASML Introduction and Recent Developments in Measurement and Metrology

Dr. Maarten Voncken | ASML Research, The Netherlands

Wed, 02.10.2024  |  14:00
Room: Max Born Hall
MBI Colloquium

TBA

Prof. Francesca Calegari | Center for Free-Electron Laser Science (CFEL), DESY Hamburg

Wed, 16.10.2024  |  14:00
Room: Max Born Hall
MBI Colloquium

TBA

Prof. Markus Gühr | DESY Hamburg

Tue, 03.12.2024  | 
Room: Gerthsen-Hörsaal, Newtonstraße 15, 12489 Berlin
Colloquium

Kolloquiumsvortrag zum Film Oppenheimer

Günter Steinmeyer | Humboldt-Universität zu Berlin | Max-Born-Institut